The ARP is a modular style, direct operated precision regulator. A locking adjustment knob allows the pressure to be set, and then locked to prevent accidental setting changes. The ARP20/30/40 series is available with a backflow function that exhausts the air pressure in the outlet side reliably and quickly. Special applications include (10-) clean room compliant, (20-)copper-free, fluorine-free, and (21-) clean room compliant, copper-free, fluorine-free and silicon-free.
The SRF30 series is designed to regulate DI water and N2 gas in the clean room. Fluoro resin material is used in the fluid contact area. The fluid contact area is washed with freon ultra sonic and DI water.
Clean regulator series SRH is a contamination controlled stainless steel regulator designed to minimize residual fluid. Design includes an intake/exhaust port in the diaphragm compartment, which facilitates flow. SRH has outstanding corrosion resistance. All metal parts in contact with fluid use stainless steel SUS316.
High precision, low flow consumption, stainless steel regulator SRP has excellent corrosion resistance. SUS316 is used for all metal parts in contact with the fluid. Consistent clean room production is achieved by cleaning, assembling, inspecting, and sealing in double packaging in a class 10,000 environment.
SF series clean air filters are available as cartridge type or disposable type models. The filtration level is 0.01 micron (filtering efficiency of 99.99%) on units with membrane elements. The SFB20, with a sintered metallic element, has a nominal filtration of 120 micron. The SF series can be used under different environments with chemical resistant and heat resistant materials (refer to catalog specifications for each series).